Mohammad Nuzaihan Md Nor
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Preferred name
Mohammad Nuzaihan Md Nor
Official Name
Mohammad Nuzaihan , Md Nor
Alternative Name
Nuzaihan, M. N.M.
M.Nuzaihan, M. N.
Md Nor, Mohammad Nuzaihan
Nuzaihan, M. M.
Nor, M. N.Md
Md Nor, M. Nuzaihan
Main Affiliation
Scopus Author ID
57219031365
Researcher ID
FMD-4992-2022

Research Output

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  • Publication
    Fabrication of nano and micrometer structures using electron beam and optical mixed lithography process
    ( 2011-01)
    S. F. Abd Rahman
    ;
    Uda Hashim
    ;
    Mohammad Nuzaihan Md Nor
    ;
    M. E. A. Shohini
    In this paper, the fabricated pattern of nanometer and micrometer structures created with electron beam lithography (EBL) and optical lithography on silicon on insulator (SOI) material are presented. The resist used to demostrate this EBL pattern creation is ma-V 2403 which is a negative tone photoresist series, while positive resist PRI-2000A is used to transform photomask design using optical lithography. Three different patterns structures are fabricated on each sample namely alignment mark, silicon, nanowire and metal pad. The JEOL scanning electron microscopy (SEM) has been modified to integrate with RAITH software to be used for electron beam lithography. Nano-scaled nanowires were first patterned by EBL and formed by ICP ething followed by micro-sized-contact pads were defined bt photolithography process. The approachICP etching followed by micro-sized -pad were defined by photlithography process. The approach describe in this paper is a mix-and-match techniques uising both conventional photholilthography and advanced nanolithoragraphy, making use of an alignment strategy.
  • Publication
    Fabrication of nano and micrometer structures using electron beam and optical mixed lithography process
    ( 2011-01)
    S. F. Abd Rahman
    ;
    Uda Hashim
    ;
    Mohammad Nuzaihan Md Nor
    ;
    M. E. A. Shohini
    In this paper, the fabricated pattern of nanometer and micrometer structures created with electron beam lithography (EBL) and optical lithography on silicon on insulator (SOI) material are presented. The resist used to demostrate this EBL pattern creation is ma-V 2403 which is a negative tone photoresist series, while positive resist PRI-2000A is used to transform photomask design using optical lithography. Three different patterns structures are fabricated on each sample namely alignment mark, silicon, nanowire and metal pad. The JEOL scanning electron microscopy (SEM) has been modified to integrate with RAITH software to be used for electron beam lithography. Nano-scaled nanowires were first patterned by EBL and formed by ICP ething followed by micro-sized-contact pads were defined bt photolithography process. The approachICP etching followed by micro-sized -pad were defined by photlithography process. The approach describe in this paper is a mix-and-match techniques uising both conventional photholilthography and advanced nanolithoragraphy, making use of an alignment strategy.
  • Publication
    Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection
    ( 2022)
    Siti Fatimah Abd Rahman
    ;
    Nor Azah Yusof
    ;
    Mohd Khairuddin Md Arshad
    ;
    Uda Hashim
    ;
    Mohammad Nuzaihan Md Nor
    ;
    Mohd Nizar Hamidon
    A highly sensitive silicon nanowire (SiNW)-based sensor device was developed using electron beam lithography integrated with complementary metal oxide semiconductor (CMOS) technology. The top-down fabrication approach enables the rapid fabrication of device miniaturization with uniform and strictly controlled geometric and surface properties. This study demonstrates that SiNW devices are well-aligned with different widths and numbers for pH sensing. The device consists of a single nanowire with 60 nm width, exhibiting an ideal pH responsivity (18.26 × 106 Ω/pH), with a good linear relation between the electrical response and a pH level range of 4–10. The optimized SiNW device is employed to detect specific single-stranded deoxyribonucleic acid (ssDNA) molecules. To use the sensing area, the sensor surface was chemically modified using (3-aminopropyl) triethoxysilane and glutaraldehyde, yielding covalently linked nanowire ssDNA adducts. Detection of hybridized DNA works by detecting the changes in the electrical current of the ssDNA-functionalized SiNW sensor, interacting with the targeted ssDNA in a label-free way. The developed biosensor shows selectivity for the complementary target ssDNA with linear detection ranging from 1.0 × 10−12 M to 1.0 × 10−7 M and an attained detection limit of 4.131 × 10−13 M. This indicates that the use of SiNW devices is a promising approach for the applications of ion detection and biomolecules sensing and could serve as a novel biosensor for future biomedical diagnosis.
  • Publication
    Cost effective negative Plenum Cleanroom for Microelectronic Engineering undergraduate
    ( 2005)
    Uda Hashim
    ;
    Zul Azhar Zahid Jamal
    ;
    Mohammad Nuzaihan Md Nor
    ;
    Nur Hamidah Abdul Halim
    he Negative Plenum Cleanroom which is design and built by KUKUM is primarily used for the teaching of the undergraduate microelectronic course. The cleanroom is approximately 115m² in size. The level of cleanliness in the cleanroom ranges from ISO Class 5 (Yellow Room) to ISO Class 8 (Grey Area/Utility Chase). The cleanroom is constructed with a negative plenum to house the fan filter units, which make it different from other commercially available cleanrooms. With negative plenum, maintenance work cost will be reduced and make the cleanroom life longer. The main intention of this project is to expose and teach students to appreciate the stringent cleanroom protocols, health and safety requirement in addition to the formal course works.
  • Publication
    Fabrication and simulation of silicon nanowire pH sensor for Diabetes Mellitus detection
    ( 2023-04)
    C. Y. Chean
    ;
    Mohammad Nuzaihan Md Nor
    ;
    Mohamad Faris Mohamad Fathil
    ;
    M. I. Hashim
    ;
    Nur Hamidah Abdul Halim
    ;
    Zarimawaty Zailan
    ;
    Mohd Khairuddin Md Arshad
    ;
    Syamsul Syahrun Awang@Hashim
    ;
    Rozaimah A.T
    Diabetes Mellitus (DM) is a disease failed to control the balance of blood sugar level due to lack of insulin thereby it effect human health. In Malaysia, there are around 3.9 millions people aged 18 years old and above have diabetes according to National Health and Morbidity Survey 2019. Silicon Nanowire is a nanostructure which has ultra-high sensitivity and non-radioactive that has potential given good performances when applied on pH sensor and biosensor. Silicon nanowire pH sensor and biosensor is an electronic sensor that investigated to improve the sensitivity and accuracy for detecting DM. This project consists of two parts, which are fabrication of silicon nanowire pH sensor and simulation of silicon nanowire biosensor as preliminary study. In fabrication, silicon nanowire of pH sensor is fabricated by conventional lithography process, reaction ion etching (RIE) and metallization to achieved the width of 100 nm silicon nanowire. The pH6, pH7, pH10 and DI water as analytes to analysis the current-voltage (I-V) characteristics of silicon nanowire pH sensor. In second part, the silicon nanowire biosensor as preliminary study is done simulation by Silvaco ATLAS devices simulator. The silicon nanowire with 30 nm in height and 20 nm in width of biosensor is designed and simulated to analyze the performance in terms of sensitivity. I-V characteristics of silicon nanowire biosensor according to different concentration of negative interface charge is determined. The negative interface charge represent as the Retinol Binding Protein 4 (RBP4) which is used to diagnose DM. The I-V characteristic based on the change in current, resistance and conductance to determine sensitivity. Lastly, the sensitivity of silicon nanowire pH sensor obtained 23.9 pS/pH while the sensitivity of simulated silicon nanowire biosensor obtained 3.91 nS/e.cm2. The results shown the more negative charge of concentration analyte attached on surface silicon nanowire has been accumulated more current flow from drain terminal to source terminal. It leads to the resistance becomes highest and obtained good sensitivity. In summary, the silicon nanowire pH sensor exhibited good performance and high sensitivity in detection pH level. The simulated silicon nanowire biosensor is capable of detecting biomolecular interactions charges to obtained high sensitive and accuracy result.
  • Publication
    Simulation and investigation of Si-based piezoelectric micromachined ultrasonic transducer (PMUT) performances
    ( 2023-07)
    Hasnizah Aris
    ;
    Muhammad Nizam Bin Rosli
    ;
    Mohammad Nuzaihan Md Nor
    ;
    Zaliman Sauli
    ;
    Wan Mokhdzani Wan Nor Haimi
    Micro-electromechanical system (MEMS) based piezoelectric ultrasonic transducers for acoustic imaging of the surroundings are known as piezoelectric micromachined ultrasonic transducers (PMUTs). This research proposes a structural design of the PMUT with four fixed-guided beams. The beam is subjected to lateral loads, with vectors that are perpendicular to the longitudinal axis. This project simulated Piezoelectric Micromachined Ultrasonic Transducer (PMUT) with three different material properties i.e. Aluminium Nitride (AlN), Lead zirconate titanate (PZT) and Zinc Oxide (ZnO). Based on the study, it was found that reducing the beam dimensions and increasing the plate size will result in the first mode frequency reduction from 1.33x107 Hz to 3.74x106 Hz. Other than that, it was found that AlN PMUT experienced the maximum deflection of 6.3413 to 6.3478 μm when the loads applied in the range of 50 to 200 μN/m2. When the piezoelectric material changed to PZT, we obtained the maximum deflections of 0.3771 to 0.3786 μm when the same loads range applied to the PMUT. As for the ZnO PMUT, the maximum deflections obtained were in between 0.1702 μm to 0.1772 μm with the loads are maintained as in the loads applied to the AlN and PZT. This study proved the significant impact of altering the structural dimensions and material properties of PMUTs on their operational characteristics, specifically the first mode frequency and deflection behavior.
  • Publication
    Nanoparticle-based biosensors for detection of heavy metal ions
    ( 2023-10)
    Y. J. Beh
    ;
    Mohammad Nuzaihan Md Nor
    ;
    Syarifah Norfaezah Sabki
    ;
    S. B. Chia
    ;
    C. H. Ng
    ;
    C. C Ong
    ;
    Mohamad Faris Mohamad Fathil
    ;
    Zarimawaty Zailan
    Heavy metal pollution is one of the most serious environmental problems in the world. Many efforts have been made to develop biosensors for monitoring heavy metals in the environment. Development of nanoparticle-based biosensors is the most effective way to solve this problem. This review presents the latest technology of nanoparticle-based biosensors for environment monitoring to detect heavy metal ions, which are magnetic chitosan biosensor, colorimetric biosensor, and electrochemical biosensor. Magnetic chitosan biosensor acts as a nano-absorbent, which can easily detect and extract poisonous heavy metal ions such as lead ions and copper ions. There are several methods to prepare the chitosan based on the nanoparticle, which are cross-linking, co-precipitation, multi-cyanoguanidine, and covalent binding method. In colorimetric biosensor, gold and silver nanoparticles are commonly used to detect the lead and mercury ions. In addition, this biosensor is very sensitive, fast and selective to detect metal ions based on the color change of the solution mixture. Meanwhile, electrochemical biosensor is widely used to detect heavy metal ions due to a simple and rapid process, easy, convenient and inexpensive. This biosensor is focused on the surface area, which leads to significant improvement in the performance of devices in terms of sensitivity. The wide surface area can affect the performance of the biosensor due to a limited space for operation of electrode. Therefore, reduced graphene oxide is a suitable material for making the electrochemical biosensor due to a wide surface area, good conductivity and high mechanical strength. In conclusion, these three technologies have their own advantages in making a very useful biosensor in the detection of heavy metal ions.