Now showing 1 - 2 of 2
  • Publication
    Hydrothermal growth of titania nanowires for SAW device sensing area
    Synthesis of titania or titanium dioxide (TiO 2) is attracted to energy and environmental applications. Here, the growth of nanostructure TiO 2 nanowires on Si (100) substrates by using the two-step method. Different seed layers of TiO 2 were deposited by spin coating and annealing, followed by the growth of TiO 2 nanowires by using the hydrothermal method. The sol-gel technique was used in preparing the TiO 2 solution for the thin film deposition purpose. Acetic acid, hydrochloric acid and tris (2-aminoethyl) amine were used as a stabilizer to synthesize three different TiO 2 seed layers. The aim of this study was to understand the role of polycrystalline size on thin film towards the diameter of nanowires grown as a sensing area in Surface Acoustic Wave (SAW) Biosensor. The morphology and structure of the thin film and TiO 2 nanowires were characterized using X-Ray diffraction (XRD), scanning electron microscope (SEM), field emission scanning electron microscope (FESEM) and atomic force microscopy (AFM).
  • Publication
    Characterization of Zinc Oxide (ZnO) piezoelectric properties for Surface Acoustic Wave (SAW) device
    In fabricating Surface Acoustic Wave (SAW) biosensors device, the substrate is one of important factors that affected to performance device. there are many types of piezoelectric substrate in the markets and the cheapest is zinc Oxide substrate. Zinc Oxide (ZnO) with its unique properties can be used as piezoelectric substrate along with SAW devices for detection of DNA in this research. In this project, ZnO thin film is deposited onto silicon oxide substrate using electron beam evaporation (E-beam) and Sol-Gel technique. Different material structure is used to compare the roughness and best piezoelectric substrate of ZnO thin film. Two different structures of ZnO target which are pellet and granular are used for e-beam deposition and one sol-gel liquid were synthesize and compared. Parameter for thickness of ZnO e-beam deposition is fixed to a 0.1kÅ for both materials structure and sol-gel was coat using spin coat technique. After the process is done, samples are annealed at temperature of 500°C for 2 hours. The structural properties of effect of post annealing using different material structure of ZnO are studied using Atomic Force Microscopic (AFM) for surface morphology and X-ray Diffraction (XRD) for phase structure.