The limitation and complexity of current available biosensor to detect nano-scale organism has introduce an idea to develop simple, high sensitivity and performance biosensor. Surface acoustic wave (SAW) device which widely used in telecommunication field had been remodeled as biosensor which able to detect the microorganism in aqueous state. Zinc oxide (ZnO) nanowires with high crystalline structure were prepared on the sensing area of SAW device through a low-cost sol-gel method coupled with a hydrothermal process. The ZnO nanowires were proposed as an effective strategy to enhance the shift frequency of the sensing device. Lift-off technique was used to develop the aluminum IDTs structure on the piezoelectric substrate. X-ray diffraction (XRD) and Scanning electron microscope (SEM) were used to study the crystal lattice orientation and physical properties of ZnO nanowires. The electrical test and frequency response were conducted to characterize the functionality of the fabricated device.
