Characterization of Excimer Laser Micromachining Parameters to Derive Optimal Performance for the Production of Polydimethylsiloxane (PDMS)-based Microfluidic Devices

Laser micromachining has been used as an alternative to producing microfluidics structures and simplifying the conventional soft lithography process. In this paper we characterize the excimer laser micromachining parameters and demonstrate its application by producing several microfluidic structures in polydimethylsiloxane (PDMS). The parameters include the number of laser pulses, laser energy and rectangular variable aperture (RVA) in both x- and y-directions. We found that the laser energy and pulse rate affect the depth of micromachining d channels, while RVA in both x- and y-directions affects the width of the channels. Repetition of laser scan does not change the channel width but significantly changes the channel depth. Proper adjustment for laser energy and pulse rate is required to fabricate a desired channels depth. In order to demonstrate the microfabrication capability of an excimer laser with the optimal operating parameters, several microfluidic structures were micromachining d into PDMS with a KrF excimer laser.