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Characterization of doped ZnO thin film for Ammonia gas sensing application
Journal
Acta Physica Polonica A
ISSN
1898-794X
0587-4246
Date Issued
2023
Author(s)
Fatin Amira Hasbullah
Anis Syafiqa Rosman
Nurul Huda Osman
D. Darminto
Institut Teknologi Sepuluh Nopember, Surabaya, Indonesia
Ali Hussain Reshak
University of Basrah, Basra, Iraq
Sebastian Garus
Częstochowa University Of Technology, Czestochowa, Poland
DOI
10.12693/APhysPolA.144.379
Abstract
This paper reports on the characterization of Sn- and Al-doped zinc oxide thin film for potential ammonia gas detection. The sol–gel method has been used to deposit the dopant onto the glass substrate at an annealing temperature of 500◦C for three different doping concentrations, which are 0.5, 1.0, and 1.5 at.%. The method used to produce this thin film is sol–gel, as it is cheap, easy, and can be employed at low temperatures. The studies involve the investigation of the morphological structures and electrical and optical properties of doped ZnO. In terms of structural properties, scanning electron microscope images of Sn- and Al-doped ZnO change as the dopant concentration is increased. The doped thin film response and recovery towards 200 ppm of ammonia were observed and recorded. Both dopants show good gas sensing response. The recorded resistance reading suggests that Al is the superior dopant in gas sensing as it produces a low resistance reading of 230 Ω as opposed to 140 kΩ produced by Sn-doped ZnO thin film.