Home
  • English
  • ÄŒeÅ¡tina
  • Deutsch
  • Español
  • Français
  • Gàidhlig
  • LatvieÅ¡u
  • Magyar
  • Nederlands
  • Português
  • Português do Brasil
  • Suomi
  • Log In
    New user? Click here to register. Have you forgotten your password?
Home
  • Browse Our Collections
  • Publications
  • Researchers
  • Research Data
  • Institutions
  • Statistics
    • English
    • ÄŒeÅ¡tina
    • Deutsch
    • Español
    • Français
    • Gàidhlig
    • LatvieÅ¡u
    • Magyar
    • Nederlands
    • Português
    • Português do Brasil
    • Suomi
    • Log In
      New user? Click here to register. Have you forgotten your password?
  1. Home
  2. Resources
  3. Journals
  4. International Journal of Nanoelectronics and Materials (IJNeaM)
  5. Simulation of piezoelectric transducer microphone diaphragm based on different materials
 
Options

Simulation of piezoelectric transducer microphone diaphragm based on different materials

Journal
International Journal of Nanoelectronics and Materials (IJNeaM)
ISSN
1985-5761
Date Issued
2024-06
Author(s)
Mohd Hafiz Ismail
Universiti Malaysia Perlis
Wen Jie Koh
Universiti Malaysia Perlis
Bibi Nadia Taib
Universiti Malaysia Perlis
Shazlina Johari
Universiti Malaysia Perlis
Siti Noorjannah Ibrahim
International Islamic University Malaysia
Abstract
Piezoelectric microphone which utilizes MEMS technology is a type of transducer that converts an input acoustic signal into an output electrical signal. The characteristics of the microphone diaphragm such as the diaphragm design features and the type of piezoelectric materials used will affect the performance of the microphone in terms of sensitivity. It is hard to control the stress of the diaphragm used in the MEMS transducer microphone. A modification of the diaphragm is done in this project to reduce the residual stress of the piezoelectric transducer. In addition, finite element analysis namely structural, modal and harmonic were carried out using Ansys 15.0 to simulate the mechanical and dynamic behaviour of the microphone diaphragm. Two types of diaphragm structure were designed, namely square and circular, while three types of piezoelectric material which are AlN, PZT and ZnO were used as the diaphragm material. The structural analysis findings of the diaphragm subjected to 1 Pa pressure revealed that the circular diaphragm made of AlN material exhibited the highest stress, reaching 43.05 GPa, surpassing the stresses observed in the other two materials. On the contrary, the square diaphragm composed of PZT material demonstrated the lowest stress, with only 1.55 GPa. In terms of resonance frequency, the circular AlN diaphragm achieved the highest resonant frequency, reaching 449.84 kHz, whereas the square PZT diaphragm exhibited the lowest frequency at 200.25 kHz. In general, the circular diaphragm design consistently yielded higher first resonant frequencies compared to the square design.The results show that the circular diaphragm with AlN piezoelectric materials is the ideal diaphragm in the microphone because of the highest stress generated and the first resonant frequency. The stress is related to the sensitivity of a microphone while the high resonant frequency can lead to the better optimization of signal to noise ratio control.
Subjects
  • MEMS

  • Piezoelectric microph...

  • Transducer

  • Stress

  • Deformation

File(s)
Simulation of Piezoelectric Transducer Microphone Diaphragm Based on Different Materials.pdf (474.68 KB)
google-scholar
Views
Downloads
  • About Us
  • Contact Us
  • Policies