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  1. Home
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  3. Institute of Nano Electronic Engineering (INEE)
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  5. Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection
 
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Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection

Journal
Nanomaterials
ISSN
2079-4991
Date Issued
2022
Author(s)
Siti Fatimah Abd Rahman
Universiti Malaysia Perlis
Nor Azah Yusof
Universiti Putra Malaysia
Mohd Khairuddin Md Arshad
Universiti Malaysia Perlis
Uda Hashim
Universiti Malaysia Perlis
Mohammad Nuzaihan Md Nor
Universiti Malaysia Perlis
Mohd Nizar Hamidon
Universiti Putra Malaysia
DOI
10.3390/nano12152652
Abstract
A highly sensitive silicon nanowire (SiNW)-based sensor device was developed using electron beam lithography integrated with complementary metal oxide semiconductor (CMOS) technology. The top-down fabrication approach enables the rapid fabrication of device miniaturization with uniform and strictly controlled geometric and surface properties. This study demonstrates that SiNW devices are well-aligned with different widths and numbers for pH sensing. The device consists of a single nanowire with 60 nm width, exhibiting an ideal pH responsivity (18.26 × 106 Ω/pH), with a good linear relation between the electrical response and a pH level range of 4–10. The optimized SiNW device is employed to detect specific single-stranded deoxyribonucleic acid (ssDNA) molecules. To use the sensing area, the sensor surface was chemically modified using (3-aminopropyl) triethoxysilane and glutaraldehyde, yielding covalently linked nanowire ssDNA adducts. Detection of hybridized DNA works by detecting the changes in the electrical current of the ssDNA-functionalized SiNW sensor, interacting with the targeted ssDNA in a label-free way. The developed biosensor shows selectivity for the complementary target ssDNA with linear detection ranging from 1.0 × 10−12 M to 1.0 × 10−7 M and an attained detection limit of 4.131 × 10−13 M. This indicates that the use of SiNW devices is a promising approach for the applications of ion detection and biomolecules sensing and could serve as a novel biosensor for future biomedical diagnosis.
Subjects
  • Silicon nanowire

  • Biosensor

  • pH

  • DNA hybridization

  • Electrical detection

File(s)
Fabrication of Silicon Nanowire Sensors for Highly Sensitive pH and DNA Hybridization Detection.pdf (2.93 MB)
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Nov 19, 2024
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