Nazuhusna Khalid
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Preferred name
Nazuhusna Khalid
Official Name
Nazuhusna, Khalid
Alternative Name
Nazuhusna, Khalid
Khalid, N.
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Scopus Author ID
35208616600
Researcher ID
CZJ-6151-2022

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  • Publication
    Film bulk acoustic wave resonator in 10-20 GHz frequency range
    ( 2017-01-03)
    Nurul Izza Mohd Nor
    ;
    Nazuhusna Khalid
    ;
    Muhammad Mahyiddin Ramli
    ;
    Muammar Mohamad Isa
    ;
    Norhawati Ahmad
    ;
    Siti Salwa Mat Isa
    ;
    Shahrir Rizal Kasjoo
    This paper presents the design and optimisation of film bulk acoustic wave resonator (FBAR) using nano electro mechanical systems (NEMS) technology in 10-20 GHz frequency band. The effect of thickness, width and length and damping factor of the FBAR are analysed. The air-gap FBAR are designed due its ability to achieve high quality (Q) factor in 10-20 GHz frequency band. The proposed designs achieve a constant electromechanical coupling coefficient for 10-20 GHz. Analysis shows the Q varies highly dependent on the damping factor. The results show that the proposed design achieves almost double the Q factor at 15 GHz and 20 GHz operation when compared to similar designs.
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