This paper was studies about the effect of difference fabrication of TiO2 nanoparticle sensor on surface morphological structure and electrical properties for detection of formaldehyde. Two type of deposition method are used to deposit TiO2 nanoparticle layer on IDE/Si/SiO2 substrate. The fabrication of IDE was done by using conventional photolithography process. In the second method, the solution TiO2 was directly deposited by using e-beam evaporator. The fabricated of sensor was further validated through characterization on morphological surface inspection and electrical properties of the device. The roughness of TiO2 film was demonstrated that the latter method is preferable due surface uniformity approximately 70 nm in grain size to provide resistance barrier to allow current flow when interface with the formaldehyde. The result was demonstrated by various measurement.
