Annealing is a heat treatment that alters the physical and sometimes chemical properties of a material to improve their crystalline structure and other important properties. This work presents the effect of post heat treatment on optical, structural, morphological, and surface roughness of Nb₂O₅ thin films at different temperatures (200-700⁰C) which to the best of our knowledge not been extensively studied yet. A clear modification in surface morphology and other studied properties was obtained. XRD results show a significant enhancement in the film’s structural properties such as a reduction in the dislocation densities and stress. The optical properties of the treated films show a clear decrease in the transmission and energy gap values which their values were found to reduce from (4.35 to 2.9) eV with heat treatment up to 600⁰C and re-increase at 700⁰C. The surface roughness was also enhanced as a result of increasing the grain size from (9.95 – 34.7) nm Finally, SEM images of the films show an obvious change in their morphology and an increase in film uniformity as a result of heat treatment. Therefore, heat treatment could be considered as a helpful method to control film characteristics. Main result should be presented quantitatively.
