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  5. Fabrication of interdigitated electrodes (IDEs) using basic conventional lithography for pH measurement
 
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Fabrication of interdigitated electrodes (IDEs) using basic conventional lithography for pH measurement

Journal
AIP Conference Proceedings
ISSN
0094243X
Date Issued
2017-03-13
Author(s)
Farehanim M.
Hashim U.
Azizah N.
Fatin M.
Azman A.
DOI
10.1063/1.4975262
Handle (URI)
https://hdl.handle.net/20.500.14170/12211
Abstract
Interdigitated electrode (IDEs) can be created by straightforward procedure utilizing essential routine lithography process. Besides, IDEs based biosensors have an incredible potential to serve as ultra-high sensitive and mark free bio detecting application. These biosensors are reasonable in recognizing DNA biomolecules, pH solution, proteins and even single virus infections. In this test, we report the geometrical components and execution of IDEs for pH solution. The electrodes were intended for 10micron sizes utilizing top-down approach was used in the development of resist mask and electrode from silicon oxide (SiO2) wafer including checking on scanning electron magnifying instrument (SEM) based UV exposure using mask aligner. The pH level detection was performed in based on several types of aqueous pH buffer solutions (pH 4, pH 7and pH 10) to test the electrical reaction of the sensor. The Morphology and electrical reactions have been directed to demonstrate the qualities of the IDEs sensor on pH measurement.
Funding(s)
Institut écologie et environnement
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