Development and fabrication of single-walled carbon nanotube (SWNT) based pH sensor were reported. The precise alignment of individual SWNT using dielectrophoresis method between the two microgap electrodes was conducted, and the effects of precise alignment of individual SWNT on impedance, long term stability, and capacitance of the sensor were studied. The pH sensor was fabricated using conventional photolithography and wet etching process. The impedance values were found to decrease in the order of distilled water > pH 10 > pH 5 > pH 3 > air. Without the alignment of SWNT, the capacitances values decreased with increasing of pH values at low frequency. All the impedance and capacitance results were highly repeatable.
