In this study, three different types of hybrid structures SERS sensors made from different mixing ratio of trimetallic (Ag-Au-Pd) nanoparticles of [Au1: Ag1: Pd1] , [Au1: Ag2: Pd1] , [Au1: Ag2: Pd2] in surface alloying forms deposited on macro porous silicon (macroPsi) layer were created and extensively tested. By using a simple and fast immersion process, trimetallic (AgAu-Pd) nanoparticles were created utilizing ion reduction of numerous metallic salts on a macro porous silicon (macroPsi) layer. The macroPsi layers were created using a laser assisted etching (LAE) technique for 15 minutes with a constant density of approximately (28mA/c.m2). At a constant concentration (10-3 M) of HAu.Cl4, Ag.NO3 and Pd.Cl2 to synthesize Au-NPs, Ag-NPs and Pd-NPs, immersion processes with various mixing ratios were performed. The hybrid structures of SERS sensors were examined using XRD, FE-SEM, and Raman microscopes. The sensors were tested at different concentrations from 10-6 to 10-12 of MB target molecules. The SERS trimetallic sensors demonstrated a considerable reliance on hot spot zones among trimetallic nanoparticles. Higher enhancement factor with lower detection limit of Raman signal was obtained from [Au1: Ag2: Pd2] hybrid structures SERS sensor of about 1.5×1010 and 10-14 respectively, due to extra ordinary specific surface area and high surface density forming trimetallic nanoparticles . The variations of mixing ratio of trimetallic (Ag-Au-Pd) provide an effective pathway to develop the sensors performance towards detection of lower concentrations.
