The preparation process of ZnO TCO (Transparent Conducting Oxide) thin films have been conducted in this paper. A Q-switched Nd:YAG laser of 7 ns duration and 1 joule of energy was utilized to perform the deposition process of ZnO/glass heterojunction. Up to the optimum oxygen pressure, optical constant and properties of the prepared samples have been investigated. Under oxygen ambient of 300 torrs and without post-deposition heating treatment, the results recorded an electrical sensitivity of 0.0221 Ω.cm. higher transparency of 80% was also listed with a reduction in its value alongside with the reduction of the substrate temperature. Further, the energy bandgap has found to be 3.46 electron-volts.
