In this work, thermal annealing processes was depended in order to prepare (Δ) phase LiNbO3 and the properties of nanostructure films was characterized. The sol–gel method was used to grow and deposit high purity Lithium-Niobate Nano and Micro-structure on a quartz substrate, at three different annealing temperatures. The structural, morphological, and optical properties of grown films have been investigated using X-ray diffraction, scanning electron microscopy, atomic force microscopy, optical study through Raman spectroscopy, UV–Vis and Photoluminescence. The measurements showed that the structure was crystalline in nature and the grains are regularly distributed within the film as a result of increasing the annealing temperature. This observation is typically used in optical waveguides and other optoelectronics applications.
