Thermal annealing was performed on fused silica substrate for metal-ferroelectric-metal (MFM) at 900°C for 2 hours by sol-gel coated of BaTiO3 as ferroelectric material and e-beam evaporation of ITO as electrode. Standard optical and physical characterization were performed such as XRD, UV-VIS Spectrophotometer, AFM and Hall measurement for electrical properties. XRD patterns of thin films shows that the samples is crystalline in a cubic structure. Optical analysis showed high transparency at 400-800nm which is >80% transmission while the low resistivity for ITO ∼ 10-3.
