Publication:
The influence of design parameters on the performance of FBAR in 10-14 GHz

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cris.author.scopus-author-id 55229582100
cris.author.scopus-author-id 37261764900
cris.author.scopus-author-id 55898869500
cris.author.scopus-author-id 35208616600
cris.author.scopus-author-id 57202563525
cris.author.scopus-author-id 57201669864
cris.author.scopus-author-id 57198501141
cris.author.scopus-author-id 55891565000
cris.author.scopus-author-id 36809748400
dc.contributor.author Nor N.I.M.
dc.contributor.author Osman R.A.M.
dc.contributor.author Idris M.S.
dc.contributor.author Khalid N.
dc.contributor.author Mohamad Isa M.
dc.contributor.author Ahmad N.
dc.contributor.author Mat Isa S.S.
dc.contributor.author Ramli M.M.
dc.contributor.author Kasjoo S.R.
dc.date.accessioned 2025-01-13T06:46:57Z
dc.date.available 2025-01-13T06:46:57Z
dc.date.issued 2017-11-22
dc.description.abstract This research presents the analysis of the influence of design parameters on the performance of film bilk acoustic wave resonator (FBAR) working from 10 GHz to 14 GHz. The analysis is done by implementing one-dimensional (1-D) modellings, which are 1-D Mason model and Butterworth Van Dyke (BVD) model. The physical parameters such as piezoelectric materials and its thickness, and size of area affecting the characteristics of the FBAR are analyzed in detail. Zinc oxide (ZnO) and aluminum nitride (AlN) are chosen as the piezoelectric materials. The resonance area is varied at 25μm×25μm to 35μm×35μm. From the analysis, it is found that as the frequency increases, the thickness of the piezoelectric material decreases. Meanwhile, the static capacitance increases as the frequency increases. It is also found that as the area increases, the electrical impedance and static capacitance also increases.
dc.identifier.doi 10.1051/epjconf/201716201041
dc.identifier.scopus 2-s2.0-85036662528
dc.identifier.uri https://hdl.handle.net/20.500.14170/11452
dc.relation.grantno undefined
dc.relation.ispartof EPJ Web of Conferences
dc.relation.ispartofseries EPJ Web of Conferences
dc.relation.issn 21016275
dc.rights open access
dc.title The influence of design parameters on the performance of FBAR in 10-14 GHz
dc.type Conference Proceeding
dspace.entity.type Publication
oaire.citation.volume 162
oairecerif.affiliation.orgunit Universiti Malaysia Perlis
oairecerif.affiliation.orgunit Universiti Malaysia Perlis
oairecerif.affiliation.orgunit Universiti Malaysia Perlis
oairecerif.affiliation.orgunit Universiti Malaysia Perlis
oairecerif.affiliation.orgunit Universiti Malaysia Perlis
oairecerif.affiliation.orgunit Universiti Malaysia Perlis
oairecerif.affiliation.orgunit Universiti Malaysia Perlis
oairecerif.affiliation.orgunit Universiti Malaysia Perlis
oairecerif.affiliation.orgunit Universiti Malaysia Perlis
oairecerif.citation.number 01041
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person.identifier.scopus-author-id 55229582100
person.identifier.scopus-author-id 37261764900
person.identifier.scopus-author-id 55898869500
person.identifier.scopus-author-id 35208616600
person.identifier.scopus-author-id 57202563525
person.identifier.scopus-author-id 57201669864
person.identifier.scopus-author-id 57198501141
person.identifier.scopus-author-id 55891565000
person.identifier.scopus-author-id 36809748400
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