Transparent conducting for pure and incorporated aluminum cadmium oxide (CdO:Al) thin films was prepared using spray pyrolysis method at a substrate temperature of 425 oC and a spray time of 25 minutes. The effects of Al incorporation on structural, optical, and electrical properties as well as surface morphology of the prepared films were inverstigated as a function of aluminum concentration. Calculations of crystallite size, dislocation density, as well as microstrain based on XRD patterns of the samples were performed. The incorporated Al induces a significant decrease in peaks’ intensity and changes the preferred orientation. The band gap energy varies from 2.45 eV to 2.57 eV, depending on the Al concentration. Low refractive index (n) is achieved for CdO:Al samples.The sheet resistance measurements demonstrate an observable increase and decrease with Al incorporation.
