Very simple and low-cost raw material was used to prepare Al2O3 nano-thin films Only Al(No3)3-9H2O and 2-methoxy ethanol were used to prepare the required thin films employing spray pyrolysis method at low substrate temperature. The FTIR results ensure the formation of the Al-O bond which appears at different absorption peaks. Effect of substrate temperatures reveals the dependence of Al-O bond formation on the variation of substrate temperatures from 200 up to 400oC. This was confirmed by the x-ray diffraction results which ensure the formation of the Al2O3 amorphous structure. SEM results insure the formation of nanostructure Al2O3 thin films.
