Lithium Niobate thin films LN (LiNbO 3 ) were prepared on a Si substrate using heat-assisted - spin coating method. A halogen lamp was used as a heating source during the deposition process. Several substrate temperatures ranges from (60–120) o C were employed. The samples were characterized and analyzed by UV–Vis spectroscopy and photoluminescence (PL). The obtained results confirm that changing the substrate temperature could affect the characteristics of the prepared films. It was observed that the structure become more crystallize with high regularity as temperature rise. An increasing in the microelectronic Raman emission ensures enhancement in the formation of the required material with substrate heating. Optical energy band gaps, lattice constants, optical dielectric constant, and the values of the refractive index revealed a variation with temperature and indicated a good agreement with experimental data.
