Nanogap is increasingly known to be beneficial, dependable and higher sensing technology. Another possible purpose is to examine a bioactivity and study the reaction of single molecule. It is important to carefully recognize the differences between the sensor surface and electrode in order to incorporate the biological system with nanogap. Also, it crucial to examine the dielectric properties between the planar nanogap with and without a sample. Electrical concentration between the electrodes could be increased due to integrating of microfluidic channel when the sample is being used. This paper is a report on an electrical point of view of planar nanogap capacitor device with comparison of different excitation frequency with and without microfluidic channel. By using 40 nm Si nanogap devices, the sensitivity of nanogap was compared by dropping deionized water and pH 7 onto the target. Experiments were carried out in wide range of frequencies from 1 Hz to 1 MHz at room temperature with 30 mV input signal (0 V, DC, Offset). Both effects of excitation frequency on capacitance sampling with 10 μm microfluidic integration were analyzed.
