Intraocular MEMS capacitive pressure sensors are useful for measuring intraocular pressure (IOP) for Glaucoma patients. For normal person, IOP reading range within 10-21mmHg. For IOP applications, compatible biomedical sensors are required to operate in the range of 0-8 kPa (0-60mmHg). Intraocular MEMS capacitive pressure sensors are widely used in IOP measurement because it provides higher sensitivity to pressure, low noise, low temperature sensitivity and micro in size. In this research project, a corrugated MEMS capacitive pressure sensor is designed and demonstrated using COMSOL Multiphysics software. Result obtained from the simulation is the deflection of the corrugated diaphragm when 8kPa pressure is applied. From the diaphragm deflection, sensors mechanical sensitivity, capacitance sensitivity and residual stress varies with the pressure applied. When corrugation depth is increased, maximum deflection will decrease, hence the capacitance value is increased respectively. Capacitance sensitivity for corrugation depth, H=32 μm is obtained at 6.8451x10-3 fF/Pa which is 0.684% higher than flat diaphragm’s capacitance sensitivity. From the simulation, it is proven that residual stress for corrugated diaphragm is 63.147 MPa which is lower than flat diaphragms residual stress. The optimized parameter for corrugation depth is at H=45 μm which has higher capacitance sensitivity and smallest residual stress.
