Transparent conductive nanocomposite thin films of indium tin oxide (ITO) and carbon nanotubes (CNTs) in various concentrations are prepared on flexible polyethyleneterephtalate (PET) substrate using spin coating process. CNTs distributed homogeneously into ITO solution by sonication technique. The annealing of the substrate was performed by excimer laser annealing. The sheet resistance was found to drop by 50 % compared to pure ITO film, while transparency remained with no significant changes when using up to 0.08 % CNT. The uniformity was studied by scanning electron microscopy and the rms roughness of 12 nm was obtained by atomic force microscopy (AFM). The addition of the carbon nanotubes to ITO solutions could effectively increase the mechanical strength of the CNT/ITO thin films.
