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  5. Fabrication of carbon nanotube field-effect transistor using shadow mask technique
 
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Fabrication of carbon nanotube field-effect transistor using shadow mask technique

Journal
International Journal of Nanoelectronics and Materials (IJNeaM)
ISSN
1985-5761
Date Issued
2022-07
Author(s)
Ankita Dixit
Birla Institute of Technology and Science
Navneet Gupta
Birla Institute of Technology and Science
Suraj Baloda
Birla Institute of Technology and Science
Handle (URI)
https://ijneam.unimap.edu.my/
https://ijneam.unimap.edu.my/images/PDF/ijneam%20july%202022%20pdf/IJNEAM2022007_Final_pr_verified.pdf
https://hdl.handle.net/20.500.14170/13904
Abstract
In this work, a new approach based on shadow mask has been reported for fabricating lowcost carbon nanotube field-effect transistor (CNFET) with interdigitated source and drain electrodes. The drop cast method is used for depositing CNTs, which was characterized using Field Emission Scanning Electron Microscope (FESEM) and RAMAN spectroscopy. The RAMAN spectroscopy confirms the deposition of CNT and SEM images demonstrated the deposition of CNT network on dielectric layer without using O2 plasma etching. Further, Keithley 4200 SCS parameter analyzer was used to perform the electrical characterization of the fabricated device. The results indicated that the fabricated CNFET follow the trend of p-type multichannel CNFET.
Subjects
  • CNT

  • Interdigitated electr...

  • Multichannel Carbon N...

  • Shadow Mask Technique...

File(s)
Fabrication of Carbon Nanotube Field-Effect Transistor Using Shadow Mask Technique.pdf (1.05 MB)
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