Competition among the industrial field is more aggressive. In order to assure the fitness of the industry in the competition environment, quality of the product is the main focus in each industry. This case study research has been done at Company Z which is one of the main key player of semiconductor manufacturer at notch region of Malaysia. This company mainly fabricating the microchip for smart end application such as smart watch, cell phone speaker and Electronic & Electric (E&E). In order to make sure that product has been shipped to customer is defect free, Automated Optical Inspection (AOI) tool has been used to capture any physical defects that appear on the wafers surfaces. The objective of this research project is to propose an improvement method for AOI defects detection failure problem by integrating Six Sigma (DMAIC), Lean Thinking and TRIZ approaches. Second objective is to apply the proposed improvement method in analyzing, evaluating and proposing the most cost effective solution to improve the AOI defect detection failure. In this research project, Six Sigma (DMAIC) approaches is used as systematic research structure. Lean Thinking is used to optimize the value added activity and eliminate waste. While TRIZ is used to analyze the possible root cause and suggest the possible inventive principles solutions based on Contradiction Matrix results. In this case study research, the possible root causes has been identified by implement 4M1E concept. 5 whys and Causes and Effects Chain Analysis (CECA) has been used to analyze the possible root causes. From the analysis results, Man and Machine criteria were the root causes of defects escapee from AOI. From the root causes found, TRIZ – Contradiction Matrix was used to identify the related inventive principles. Finally, the best fit inventive principles were selected and several solutions were proposed. From the proposed methods and solutions, AOI tool down time due to maintenance activities for AOI lamp replacement has been minimized. Moreover, technician skills for sensitivity program setup also has been improve and standardize through in class and hand on training.