Silicon (Si) nanostructure was prepared using a cheap and in-house technique. The device was fabricated via dry oxide etching approach with a controlled oxygen flow rate in an oxidation furnace, a network of uniform Si nanowires were successfully fabricated. The device was functionalized by (3-aminopropyl) triethoxysilane (APTES) to serve as a sensor for heavy metal detection. The amino-functionalized Si nanowires were characterized based on variation SPX spectra of four different element that, O, OH, NH2 and Si-O-NH2. Three major peaks in the C 1s region one at 289 eV is were detected indicating for the Si-O attaching, values of 287eV 30 for Si-OH, 285eV for NH2 and 83eV for Si-O-NH2 representing hydroxide, amine and modified silicon surface that that established nitrogen atoms (-NH2, -NH-). Thus, the study identifies different chemical environments to identify heavy metals in water.
