The pulsed laser deposition (PLD) technique was used to deposit a lithium niobate (LN) layer on a single crystal silicon substrate in this study. Based on the properties of LN film, a design and modeling of Mach-Zehnder electro-optic modulators (EOM) has been presented. The LiNbO3/SiO2/Si system’s structural, morphological, and optical characteristics were examined. X-ray diffraction data verified the creation of LN, and diffraction of x-rays from the (012) and (302) planes confirmed the establishment of phase. The AFM measurements show that a remarkably homogeneous nanostructure with a maximum roughness of 12.9 nm has formed. The built device demonstrates that recent advances in hybrid MZ modulators LD and various electro-optic materials have resulted in minimal loss and a broad modulation bandwidth.
