Publication:
Fabrication of Silicon Nanowire Sensors for Highly Sensitive pH and DNA Hybridization Detection
Fabrication of Silicon Nanowire Sensors for Highly Sensitive pH and DNA Hybridization Detection
| cris.author.scopus-author-id | 26435546400 | |
| cris.author.scopus-author-id | 57187020900 | |
| cris.author.scopus-author-id | 57211870224 | |
| cris.author.scopus-author-id | 22633937800 | |
| cris.author.scopus-author-id | 57219031365 | |
| cris.author.scopus-author-id | 57193352921 | |
| cris.virtual.department | Universiti Malaysia Perlis | |
| cris.virtual.department | Universiti Malaysia Perlis | |
| cris.virtual.department | Universiti Malaysia Perlis | |
| cris.virtualsource.department | 4eedcc49-694d-468e-89f5-beefede12c76 | |
| cris.virtualsource.department | cbc99d4d-6211-466b-bb62-06960f8c24ca | |
| cris.virtualsource.department | 68ee25e1-5fda-40a0-a39c-ded2003ba743 | |
| dc.contributor.author | Abd Rahman S.F. | |
| dc.contributor.author | Yusof N.A. | |
| dc.contributor.author | Mohd Khairuddin Md Arshad | |
| dc.contributor.author | Uda Hashim | |
| dc.contributor.author | Mohammad Nuzaihan Md Nor | |
| dc.contributor.author | Hamidon M.N. | |
| dc.date.accessioned | 2024-09-28T12:30:04Z | |
| dc.date.available | 2024-09-28T12:30:04Z | |
| dc.date.issued | 2022-08-01 | |
| dc.description.abstract | A highly sensitive silicon nanowire (SiNW)-based sensor device was developed using electron beam lithography integrated with complementary metal oxide semiconductor (CMOS) technology. The top-down fabrication approach enables the rapid fabrication of device miniaturization with uniform and strictly controlled geometric and surface properties. This study demonstrates that SiNW devices are well-aligned with different widths and numbers for pH sensing. The device consists of a single nanowire with 60 nm width, exhibiting an ideal pH responsivity (18.26 × 106 Ω/pH), with a good linear relation between the electrical response and a pH level range of 4–10. The optimized SiNW device is employed to detect specific single-stranded deoxyribonucleic acid (ssDNA) molecules. To use the sensing area, the sensor surface was chemically modified using (3-aminopropyl) triethoxysilane and glutaraldehyde, yielding covalently linked nanowire ssDNA adducts. Detection of hybridized DNA works by detecting the changes in the electrical current of the ssDNA-functionalized SiNW sensor, interacting with the targeted ssDNA in a label-free way. The developed biosensor shows selectivity for the complementary target ssDNA with linear detection ranging from 1.0 × 10−12 M to 1.0 × 10−7 M and an attained detection limit of 4.131 × 10−13 M. This indicates that the use of SiNW devices is a promising approach for the applications of ion detection and biomolecules sensing and could serve as a novel biosensor for future biomedical diagnosis. | |
| dc.identifier.doi | 10.3390/nano12152652 | |
| dc.identifier.scopus | 2-s2.0-85136982260 | |
| dc.identifier.uri | https://hdl.handle.net/20.500.14170/5444 | |
| dc.language.iso | en | |
| dc.relation.funding | Kementerian Sains, Teknologi dan Inovasi | |
| dc.relation.grantno | NND/ND/(1)/TD11-008 | |
| dc.relation.ispartof | Nanomaterials | |
| dc.relation.ispartofseries | Nanomaterials | |
| dc.rights | open access | |
| dc.subject | biosensor | DNA hybridization | electrical detection | pH | silicon nanowire | |
| dc.title | Fabrication of Silicon Nanowire Sensors for Highly Sensitive pH and DNA Hybridization Detection | |
| dc.type | Journal | |
| dspace.entity.type | Publication | |
| oaire.citation.issue | 15 | |
| oaire.citation.volume | 12 | |
| oairecerif.affiliation.orgunit | Universiti Malaysia Perlis | |
| oairecerif.affiliation.orgunit | Universiti Putra Malaysia | |
| oairecerif.affiliation.orgunit | Universiti Malaysia Perlis | |
| oairecerif.affiliation.orgunit | Universiti Malaysia Perlis | |
| oairecerif.affiliation.orgunit | Universiti Malaysia Perlis | |
| oairecerif.affiliation.orgunit | Universiti Putra Malaysia | |
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| oairecerif.author.affiliation | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| oairecerif.author.affiliation | Universiti Malaysia Perlis | |
| oairecerif.author.affiliation | Universiti Malaysia Perlis | |
| oairecerif.author.affiliation | Universiti Malaysia Perlis | |
| oairecerif.author.affiliation | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| oairecerif.citation.number | 2652 | |
| person.identifier.orcid | 0000-0002-9183-7230 | |
| person.identifier.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| person.identifier.orcid | 0000-0003-0129-0321 | |
| person.identifier.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| person.identifier.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| person.identifier.orcid | 0000-0001-9189-4465 | |
| person.identifier.scopus-author-id | 26435546400 | |
| person.identifier.scopus-author-id | 57187020900 | |
| person.identifier.scopus-author-id | 57211870224 | |
| person.identifier.scopus-author-id | 22633937800 | |
| person.identifier.scopus-author-id | 57219031365 | |
| person.identifier.scopus-author-id | 57193352921 |