Publication:
Fabrication of Silicon Nanowire Sensors for Highly Sensitive pH and DNA Hybridization Detection

cris.author.scopus-author-id 26435546400
cris.author.scopus-author-id 57187020900
cris.author.scopus-author-id 57211870224
cris.author.scopus-author-id 22633937800
cris.author.scopus-author-id 57219031365
cris.author.scopus-author-id 57193352921
cris.virtual.department Universiti Malaysia Perlis
cris.virtual.department Universiti Malaysia Perlis
cris.virtual.department Universiti Malaysia Perlis
cris.virtualsource.department 4eedcc49-694d-468e-89f5-beefede12c76
cris.virtualsource.department cbc99d4d-6211-466b-bb62-06960f8c24ca
cris.virtualsource.department 68ee25e1-5fda-40a0-a39c-ded2003ba743
dc.contributor.author Abd Rahman S.F.
dc.contributor.author Yusof N.A.
dc.contributor.author Mohd Khairuddin Md Arshad
dc.contributor.author Uda Hashim
dc.contributor.author Mohammad Nuzaihan Md Nor
dc.contributor.author Hamidon M.N.
dc.date.accessioned 2024-09-28T12:30:04Z
dc.date.available 2024-09-28T12:30:04Z
dc.date.issued 2022-08-01
dc.description.abstract A highly sensitive silicon nanowire (SiNW)-based sensor device was developed using electron beam lithography integrated with complementary metal oxide semiconductor (CMOS) technology. The top-down fabrication approach enables the rapid fabrication of device miniaturization with uniform and strictly controlled geometric and surface properties. This study demonstrates that SiNW devices are well-aligned with different widths and numbers for pH sensing. The device consists of a single nanowire with 60 nm width, exhibiting an ideal pH responsivity (18.26 × 106 Ω/pH), with a good linear relation between the electrical response and a pH level range of 4–10. The optimized SiNW device is employed to detect specific single-stranded deoxyribonucleic acid (ssDNA) molecules. To use the sensing area, the sensor surface was chemically modified using (3-aminopropyl) triethoxysilane and glutaraldehyde, yielding covalently linked nanowire ssDNA adducts. Detection of hybridized DNA works by detecting the changes in the electrical current of the ssDNA-functionalized SiNW sensor, interacting with the targeted ssDNA in a label-free way. The developed biosensor shows selectivity for the complementary target ssDNA with linear detection ranging from 1.0 × 10−12 M to 1.0 × 10−7 M and an attained detection limit of 4.131 × 10−13 M. This indicates that the use of SiNW devices is a promising approach for the applications of ion detection and biomolecules sensing and could serve as a novel biosensor for future biomedical diagnosis.
dc.identifier.doi 10.3390/nano12152652
dc.identifier.scopus 2-s2.0-85136982260
dc.identifier.uri https://hdl.handle.net/20.500.14170/5444
dc.language.iso en
dc.relation.funding Kementerian Sains, Teknologi dan Inovasi
dc.relation.grantno NND/ND/(1)/TD11-008
dc.relation.ispartof Nanomaterials
dc.relation.ispartofseries Nanomaterials
dc.rights open access
dc.subject biosensor | DNA hybridization | electrical detection | pH | silicon nanowire
dc.title Fabrication of Silicon Nanowire Sensors for Highly Sensitive pH and DNA Hybridization Detection
dc.type Journal
dspace.entity.type Publication
oaire.citation.issue 15
oaire.citation.volume 12
oairecerif.affiliation.orgunit Universiti Malaysia Perlis
oairecerif.affiliation.orgunit Universiti Putra Malaysia
oairecerif.affiliation.orgunit Universiti Malaysia Perlis
oairecerif.affiliation.orgunit Universiti Malaysia Perlis
oairecerif.affiliation.orgunit Universiti Malaysia Perlis
oairecerif.affiliation.orgunit Universiti Putra Malaysia
oairecerif.author.affiliation #PLACEHOLDER_PARENT_METADATA_VALUE#
oairecerif.author.affiliation #PLACEHOLDER_PARENT_METADATA_VALUE#
oairecerif.author.affiliation Universiti Malaysia Perlis
oairecerif.author.affiliation Universiti Malaysia Perlis
oairecerif.author.affiliation Universiti Malaysia Perlis
oairecerif.author.affiliation #PLACEHOLDER_PARENT_METADATA_VALUE#
oairecerif.citation.number 2652
person.identifier.orcid 0000-0002-9183-7230
person.identifier.orcid #PLACEHOLDER_PARENT_METADATA_VALUE#
person.identifier.orcid 0000-0003-0129-0321
person.identifier.orcid #PLACEHOLDER_PARENT_METADATA_VALUE#
person.identifier.orcid #PLACEHOLDER_PARENT_METADATA_VALUE#
person.identifier.orcid 0000-0001-9189-4465
person.identifier.scopus-author-id 26435546400
person.identifier.scopus-author-id 57187020900
person.identifier.scopus-author-id 57211870224
person.identifier.scopus-author-id 22633937800
person.identifier.scopus-author-id 57219031365
person.identifier.scopus-author-id 57193352921
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