Wan Mokhdzani Wan Nor Haimi
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Wan Mokhdzani Wan Nor Haimi
Official Name
Wan Mokhdzani, Wan Nor Haimi
Alternative Name
Norhaimi, W. M. W.
Norhaimi, Wan Mokhzani Wan
Main Affiliation
Scopus Author ID
55533946600
Researcher ID
DKW-9931-2022

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Simulation and investigation of high-frequency Si-based piezoelectric micromachined ultrasonic transducer (PMUT) performances

2024-02-08 , Hasnizah Aris , Kaharuddin N.A.A. , Zaliman Sauli , Aziz A.A. , Wan Mokhdzani Wan Nor Haimi

The application of ultrasonic transducers is relying on the frequency which the transducers resonated. In the imaging application, an ultrasonic transducer should possess resonant frequency that higher than 2 MHz while in ultrasound testing, a range of 2 to 10 MHz is seeming to be adequate. This report is investigating the performance of high frequency Si-based PMUT with different piezoelectric material used in the structure. The piezoelectric materials used are Aluminium Nitride (AlN), Lead Zirconate Titanate (PZT), and Zinc Oxide (ZnO). Using the same dimensions, the obtained resonant frequencies of PMUT are 4.0370 MHz, 2.8224 MHz, and 3.4358 MHz for AlN, PZT and ZnO respectively.

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Design and Simulation of Micro-Electro-Mechanical Systems (MEMS) Capacitive Pressure Sensor for Thermal Runaway Detection in the Electric Vehicle

2023-12-01 , M Hajizi H.M. , Aris H. , Wan Mokhdzani Wan Nor Haimi , Nurul Izza Mohd Nor , Zaliman Sauli , Aziz A.A.

Recent advancement of vehicle technologies has resulted in development of replacing conventional Internal combustion engine (ICE) to Electric Vehicle (EV) mostly powered by Lithium-ion batteries (LIB). These batteries contain massive amount of energy confined in a very small space. Thermal runaway occurs when the batteries and its circuits start to heat up anomaly. Thermal runaway can cause failures that can lead to battery ignition, resulting in explosions and imminent threats to life and property. This research focused on MEMS capacitance pressure sensor, using three distinct square slotted diaphragm designs: clamped-square, four-slotted-square, and eight-slotted-square diaphragms. The investigation commenced with an evaluation of diaphragm performance, and subsequently, the diaphragm was integrated into the structure of the MEMS capacitive pressure sensor and subjected to simulation. Varied pressure levels ranging from 0.1 to 0.35 MPa were applied to both the diaphragm and the pressure sensor. The outcomes revealed that the eight-slotted-square diaphragm yielded the most substantial displacement, registering at 5.507 µm. It also exhibited the highest Mises stress of 644.67 MPa, and recorded the highest mechanical sensitivity at 15.7545 (10-12/Pa). The clamped-square design, despite its slotted area, yielded the highest capacitance value among the three designs for the pressure sensor.

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