This paper reports the fabrication, characterization, and testing of free-standing diaphragm structure fabricated solely using the screen-printing method. Two different design structure which is circular and square diaphragm was tested. Unlike, cantilever and encastre beam, the diaphragm structure has all the periphery clamped which may result in difficulty in removing the sacrificial layer to enable the free-standing structure. The free-standing diaphragm structure was tested as a buzzer and the highest SPL level of 74 decibel was recorded between 12 kHz to 19 kHz.
Funding(s)
Engineering and Physical Sciences Research Council
