Ag/TiO2 thin film was prepared by the sol-gel method through the hydrolysis of titanium tetraisopropoxide and silver nitrate solution. Various amount of PEG was doped into the solution preparation to study the effect on crystalline state and microstructural of the prepared thin films. Spin coating method was used to get uniform film on ITO glass substrate followed by annealing process for 1 hour. The obtained thin films were analysed using XRD test, SEM and AFM. Results showed that all the prepared thin films are in anatase TiO2 Increasing the PEG amount into the solution could increase the thickness and surface roughness of the obtained thin films.