Ag-TiO2thin films with different concentration of silver (Ag) added were successfully deposited onto Si-substrate via sol-gel spin coating method. The phase analysis and microstructures of Ag-TiO2thin films have been characterized by X-ray diffractometer and scanning electron microscope. X-ray diffraction spectra show existing different phases influenced by the concentration of the Ag and the annealing temperature. The micrograph of scanning electron microscopy revealed the thin films annealed at 600 °C with 7 mol% of Ag concentration which shows that the Ag particles were found like a white dot formed on the grain of TiO2thin films.
