Shazlina Johari
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Preferred name
Shazlina Johari
Official Name
Shazlina, Johari
Alternative Name
Johari, S.
S., Johari
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Scopus Author ID
53163664100
Researcher ID
GAA-3219-2022

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  • Publication
    Simulation and analysis of Piezoresistive microcantilever
    ( 2023-12)
    Shazlina Johari
    ;
    Catherine Lim Ee Chen
    ;
    Bibi Nadia Taib
    ;
    Mohd Hafiz Ismail
    ;
    Siti Noorjannah Ibrahim
    Currently, most piezoresistive microcantilever sensors are configured with a dual-layer design that includes a piezoresistor integrated onto the upper surface of a microcantilever. The dual-layer design effectively enhances sensitivity and the piezoresistance effect. However, integrating the piezoresistor onto the microcantilever in the fabrication process necessitates additional steps, leading to extended manufacturing times and increased production costs. In this paper, the mechanical behavior of a single-layer piezoresistive microcantilever, namely displacement, stress, and strain, is investigated and analyzed using ANSYS Multiphysics. The contributing factors expected to affect the device's performance are its geometrical dimensions, and the materials used. Regarding the device dimensions, the length, thickness, and width of the cantilever were varied. It was found that the performance of the piezoresistive microcantilever can be improved by increasing the length and decreasing the thickness. The displacement of the microcantilevers increased by about 230%, from 75.76μm to 250.12μm, when the length was increased from 225μm to 350μm. The applied force ranged from 2uN to 12uN. Similarly, the stress and strain produced on the microcantilevers also increased by about 60.83% and 57.22%, respectively. From the material point of view, the microcantilever made with silicon always had the highest displacement value compared to silicon nitride, silicon dioxide, and polysilicon. This is due to the Young's modulus value, where materials with lower Young's modulus will have higher displacement and stress.